Micro patterning and Nano processing
This special issue includes topics mainly related to semiconductor research and industry, and in addition to other research and manufacturing sectors where lithography and pattern transfer are important. Contributions are focused on the lithographic material, lithographic process, metrology, and finally on advanced etching and patterning. Contributions should be mainly concentrated in a single process/method, from the tentative list below:
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EUV, and optical lithography
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Electron and Ion Beam Lithography
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Nanoimprint Lithography including R2R nanoimprint, Soft Lithography
Related Conference of Micro patterning and Nano processing
October 27-28, 2025
11th International Conference and Expo on Ceramics and Composite Materials
London, UK
November 13-14, 2025
23rd International Conference and Exhibition on Materials Science and Chemistry
Paris, France
Micro patterning and Nano processing Conference Speakers
Recommended Sessions
- Beam delivery system
- Advanced Laser Processing
- Advanced Materials & Functional Devices
- Advanced Nanomaterials- production, Synthesis and Processing
- Advanced Optical and Magnetic Material
- Brazing and Soldering
- Industrial application of Laser
- Laser-based Additive Manufacturing
- Micro and remote welding
- Micro patterning and Nano processing
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